PolyWorks|Inspector™ - The Universal 3D Metrology Software Platform by InnovMetric

PolyWorks|Inspector™ is a universal 3D dimensional analysis and quality control software solution to control tool or part dimensions, diagnose and prevent manufacturing and assembly issues, guide assembly building through real-time measurements, and oversee the quality of assembled products by using portable metrology devices and CNC CMMs. It offers an extensive set of guidance technologies for efficient, precise, and repeatable measurement processes for portable metrology devices. PolyWorks|Inspector™ offers the most flexible, user-friendly, and efficient CNC CMM offline sequencing workflow on the market.

White light interferometers for distance and thickness measurements with subnanometer accuracy

The requirements for distance and thickness measurements are extremely high in many applications. Film, flat glass, semiconductor wafers, computer hard drives or displays must be manufactured to the highest precision. Optical interferometry is an accordingly precise measuring technique. Micro-Epsilon has launched three new measuring systems based on innovative technology with accuracies down to the subnanometer range.

Distance Measurement

The IMS5400-DS interferoMETER is used for high-precision distance measurements and, unlike conventional interferometers, also enables stable measurement of step profiles. Thanks to the absolute measurement, the scanning of steps is performed with high signal stability and precision. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected.

In the semiconductor industry, sub-nanometer resolutions are often required. This is where the IMS5600-DS interferometer is used, which is specially designed for applications in vacuum or clean room environments. A special calibration of the controller provides the necessary resolution for this measuring system.

• Absolute measurement, ideal for steps and edges
• Best-in-Class: Resolution < 30 picometers
• Measurement on diverse surfaces
• Small measurement spot for finest details & structures

Thickness Measurement

The thickness measurement with the IMS5400-TH interferoMETER enables the measurement of glass or film from 35 µm up to 2.1 mm. As the thickness measurement is independent of the distance, irregular positioning does not influence the measurement result.

The thickness of transparent coated objects or laminated glass can be reliably measured thanks to the multi-layer thickness measurement. The controller outputs the thickness values with the highest stability regardless of their position.

• High precision even with varying distances
• Measuring thinnest layers like films and flat glass
• Thickness measurement even of anti-reflective Surfaces
• Multi-layer thickness measurement

Industry optimized

The new white light interferometers from Micro-Epsilon are optimized for industrial purposes and offer an accuracy that creates an unprecedented level of precision in optical distance and thickness measurements.

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